Highly precise cutting accuracy on our new FEI Versa3D Dual Beam
The FEI Versa 3D dual beam microscope recently built up in our lab is characterized by a comparable imaging and cutting resolution as our well-utilized FEI Helios NanoLab 650 S field emission scanning electron microscope and meets our expectations to our greatest satisfaction.
The FEI Versa 3D Field Emission Scanning Electron Microscope with Schottky Emitter is mainly used for cutting FIB lamellas for TEM, but may also be used to fabricate highly conductive gold nanostructures via FEBID (Focused Electron Beam Induced Deposition) or FIBID (Focused Ion Beam Induced Deposition) thanks to the built-in gold gas injection system. In addition, FEI Versa 3D features an ApolloXTM EDX detector for elemental analysis and a mounting option for a Kleindiek micromanipulator.
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