• Cold field emission high-resolution scanning electron microscope
• Resolution electron beam:
  – 1.0 nm at 15 kV 
  – 1.4 nm at 1 kV
• High and low magnification mode: 30x to 800’000x
• DISS5 control software

Detectors

• SE detector (normal)
• SE in-lens detector
• YAG backscattered elctron detector (BSE)

Typical applications

• High-resolution topographic contrast imaging of solid materials

Location

Pharmazentrum, U1006