SEM – Hitachi S-4800
Technical specifications
- Cold field emission high-resolution scanning electron microscope
- Resolution electron beam:
– 1.0 nm at 15 kV
– 1.4 nm at 1 kV - High and low magnification mode: 30x to 800’000x
- DISS5 control software
Detectors
- SE detector (normal)
- SE in-lens detector
- YAG backscattered elctron detector (BSE)
Typical applications
- High-resolution topographic contrast imaging of solid materials
Location
Pharmazentrum, U1003