• High-resolution field emission scanning electron microscope with Schottky emitter
• Magnification: 30x – 1280kx in “Quad” mode
• Resolution electron beam:
  • 1.2nm at 30kV
  • 2.9nm at 1kV
• Ion Beam Resolution:
  • 7 nm at 30 kV at the beam coincidence point (5 nm achievable with optimum working distance)
• Standard 5-axis motor table:
  • X, Y: 110mm
  • Z: 65 mm motorized
  • T: -15° to +90°
  • R: n x 360° (endless)
  • X, Y repeatability: 2.0 μm
  • Sample weight: 500g in any stage position (up to 2kg at 0 degree tilt)
  • Maximum distance between stage and point of coincidence: 85 mm at eucentric height
  • Maximum sample size: – 150mm diameter at full rotation (larger samples possible with limited rotation)

Detectors and micro analysis

• Everhart-Thornley SE Detector (ETD)
• Retractable low voltage and backscattered electron detector
• IR camera for viewing the sample/column
• High performance SE and SI (secondary ion) detector (ICE)
• Detector for Energy Dispersive X-ray Spectroscopy (Apollo EDX) with Genesis & Team Software (EDAX)

Typical applications and accessories

• Imaging, analyzing, milling and structuring of samples down to the nanometer range
• TEM excavation / TEM lamella
• Nanofabrication and micromanipulation
• Gas injection system for Au and Pt deposition (FEBID and FIBID); C deposition (only FEBID)
• Kleindiek micromanipulator

Location

Pharmazentrum, U1007