SEM – Philips XL30
Technical specifications
- Field emission scanning electron microscope with cryo unit from Gatan
- Resolution electron beam: 20 nm bei 30 kV (High vacuum mode)
Detectors and micro analysis
- SE detector
- Backscattered electron detector (BSE)
- Energy dispersive X-ray micro analysis (EDX), EDAX Genesis 6.0 software
- Modified by RemX GmbH
- DISS5 software from REM-X GmbH
Typical applications and accessories
- Examination of standard specimens in high vacuum mode
- Examination of anorganic material, SE and BSE mode in combination with EDX
- Cryo stage, especially suited for hydrated organic or heat sensitive material
Location
Pharmazentrum, U1002
Cryo Preparation Unit Gatan Alto 2500
- Nitrogen cold stage (-185°C to +50°C) and interface to SEM stage
- Nitrogen ‘heat exchange’ dewar and gas feedthroughs to SEM chamber
- Ball valve incorporating microswitches plus mechanical interlock and interface to SEM chamber
- High vacuum cryo preparation chamber, with integral nitrogen dewar, sample platform and variable temperature facility (-185°C to +100 C)
- Cold knife fracturing device
- Binocular viewer, x10 and x20 magnification
- Cold Magnetron sputter source for high resolution sputter coating (supplied with Au, AuPd and Pt target)
- Turbomolecular pump system for cryo preparation chamber
- Keypad control unit for vacuum
- ‘2-pot’ freezing station for producing nitrogen slush and loading pre-frozen samples
- Self pressurising N2 dewar with gas flow regulator for cooling SEM cold stage and gas purging
