• High-resolution field emission scanning electron microscope optimized for use with a Ga-focused Ion beam (Ga-FIB)
• 6-axes motorized super-eucentric stage
• Specimen stage movement: XY 100 mm, Z 50 mm
• Airlock 80mm gate opening
• Magnification: 33 x - 5000K x
• Resolution electron beam:
  • 0.9 nm at 15 kV
• FIB Capella column (Ga-LMIS):
  • Ion Beam Resolution: 3 nm at 30 kV
  • Voltage range: 500 V - 30 kV
  • Probe current range: 1 pA - 100 nA

Detectors and micro analysis

• SESI Detector for imaging of secondary electrons or of secondary ions
• Energy selective backscattered in-lens detector
• BSD retractable diode detector with 4 quadrants

Typical applications and accessories

• Imaging, analyzing, milling and cross sectioning of samples down to the nanometer range
• TEM lamella lift out and thinning
• Nanofabrication and micromanipulation
• Gas injection system for Pt deposition (FEBID and FIBID)
• 3-axis and Rotip Kleindiek micromanipulator

Location

Pharmazentrum, U1097