• Field emission column (FE-SEM Schottky)
• Resolution electron beam:
  • 0.7 nm @ 15 kV
  • 1.1 nm @ 500 V and 1 kV
• Magnification:  12x – 2’000’000x

Detectors and micro analysis

• SE InLens detector
• EsB detector, Energy-selective Backscattered detector for SE and BSE detection
• SE2 detector (Everhart-Thornley)
• VPSE detector, Variable Presssure Secondary Electron detector for imaging of non-conducting specimens
• aSTEM detector
• aBSD detector, annular BackScattered electron Detector for high efficiency and angle selective material characterization
• Octane Elite detector for light element detection and low kV microanalysis combined with Velocity Pro EDAX’s Electron BackScatter Diffraction (EBSD) camera
• characterization of Electron Backscatter Diffraction (EBSD) patterns (crystal orientation) within the APEX software platform

Typical applications

• Imaging and material analysis
• Crystallographic determination on the nanoscale

Location

Pharmazentrum, U1002